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A process technician plans to grow a 500nm thick thermal oxide. His plan was to grow the oxide in H0 at 1000C. He calculated
A process technician plans to grow a 500nm thick thermal oxide. His plan was to grow the oxide in H0 at 1000C. He calculated the time needed and started the process. However, when the process is done, he noticed the oxide thickness is much thinner than expected. Then he noticed he forgot to turn on the "H" torch for the HO oxidation. Calculate the extra time needed to get the final oxide thickness equal to 500nm (in H0 at 1000C). Assume (100) silicon.
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To calculate the extra time needed to achieve the desired oxide thickness we can use Ficks first law ...
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Data Analysis And Decision Making
Authors: Christian Albright, Wayne Winston, Christopher Zappe
4th Edition
538476125, 978-0538476126
