Question: A MOEMS (optical MEMS) is a MEMS (Micro Electromechanical Systems) with an optical fiber channel that takes light generated from a laser diode. It also

A MOEMS (optical MEMS) is a MEMS (Micro Electromechanical Systems) with an optical fiber channel that takes light generated from a laser diode. It also has a photodetector that measures light intensity variations and outputs voltage variations proportional to small mechanical device deflections. Additionally, a voltage input is capable of deflecting the device. The apparatus can be used as an optical switch or as a variable optical attenuator, and it does not exceed 2000 μm in any dimension. Figure P4.12 shows input-output signal pairs used to identify the parameters of the system. Assume a second-order transfer function and find the system’s transfer function (Borovic, 2005).

Open-Loop Responses Open-Loop Response (simulated, d=0.8) Volt. Open-Loop Response (experimental) -2 500

Open-Loop Responses Open-Loop Response (simulated, d=0.8) Volt. Open-Loop Response (experimental) -2 500 1000 1500 t[us] FIGURE P4.12 10 00 4) 2. x[nm]: V[V]

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