As integrated circuits operate at eversmaller resolutions, the clean handling of wafers in the manufacturing process has

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As integrated circuits operate at eversmaller resolutions, the clean handling of wafers in the manufacturing process has become even more important. The article “Particle Free Handling of Substrates” (IEEE Trans. Semicond. Manuf. 2016: 314–319) provides the following data on the number of particles detected pre- and post-handling for a sample of 16 wafers:

a. The researchers desired a confidence interval for μD, the average increase in number of particles per wafer due to handling. Why should the paired t interval not be applied here?

b. A normal probability plot of the logarithms of the difference values shows that the population of ln(D) values is plausibly normal (i.e., D may be lognormal). Take the logarithm of the differences, and use those values to construct a 95% CI for E[ln(D)].
c. It can be shown that exponentiating the endpoints of the interval from part (b) produces a confidence interval not for μD, but rather the population median μ̃D. Exponentiate the limits of the interval from part (b), and interpret this interval.

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Modern Mathematical Statistics With Applications

ISBN: 9783030551551

3rd Edition

Authors: Jay L. Devore, Kenneth N. Berk, Matthew A. Carlton

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