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Consider a 100 um long by 2 um square silicon cantilever beam with a fixed end, and deposit a 200 nm film TiO2/Pt with a tensile stress of 800 MPa. Material Properties Silicon TiO2/Pt Young's Modulus: E (GPa) 160 170 Poisson's ratio 0.22 0.35 a) Find the relaxation strain b) Find the thin film and beam stresses after relaxation ( 0,relaxed , "beam,relaxed) c) Find the radius of curvature after bending d) Find the maximum stress of the beam and the thin film stress after the bending e) Find the tip deflectionConsider a 100 um long by 2 um square silicon cantilever beam with a fixed end, and deposit a 200 nm film TiO2/Pt with a tensile stress of 800 MPa. Material Properties Silicon TiO2/Pt Young's Modulus: E (GPa) 160 170 Poisson's ratio 0.22 0.35 a) Find the relaxation strain b) Find the thin film and beam stresses after relaxation ( 0,relaxed , "beam,relaxed) c) Find the radius of curvature after bending d) Find the maximum stress of the beam and the thin film stress after the bending e) Find the tip deflection