Answered step by step
Verified Expert Solution
Link Copied!

Question

1 Approved Answer

(1) Consider a low-pressure chemical vapor deposition diffusion reactor to lay a thin film of the semiconductor gallium, Ga, onto a silicon wafer surface.

 

(1) Consider a low-pressure chemical vapor deposition diffusion reactor to lay a thin film of the semiconductor gallium, Ga, onto a silicon wafer surface. Gallium metal is not volatile, but trimethyl gallium (TMG, Ga(CH3)3, 114.72 g/g mol) is volatile. In the presence of H2 gas at high temperature, TMG will decompose to solid Ga on a surface by the following reaction: Ga(CH3)3 (g) +3/2 H (g) Ga (s) +3 CH4 (g). At 700 C, this surface reaction is diffusion limited. (a) Develop an integral model to predict the flux of TMG to the wafer surface. (b) What would be the simplified model of (a) if the reactants are dilute. (2) A porous cylinder of 2.4 cm in diameter and 80 cm long is saturated with an alcohol. The void space in the solid contains sufficient pores so that molecular diffusion can take place through the liquid in the passage. The cylinder is dropped into a large, well agitated reservoir of pure water. The agitation maintains the concentration of 1wt% alcohol at the surface of the cylinder. If the concentration at the center of the cylinder drops from 25wt% to 15wt% in 10 h, determine the concentration in weight percent at the center after 15 h.

Step by Step Solution

There are 3 Steps involved in it

Step: 1

1 a Integral model to predict the flux of TMG to the wafer surface To develop an integral model for predicting the flux of TMG to the wafer surface we... blur-text-image

Get Instant Access to Expert-Tailored Solutions

See step-by-step solutions with expert insights and AI powered tools for academic success

Step: 2

blur-text-image_2

Step: 3

blur-text-image_3

Ace Your Homework with AI

Get the answers you need in no time with our AI-driven, step-by-step assistance

Get Started

Recommended Textbook for

Fundamentals Of Momentum Heat And Mass Transfer

Authors: James Welty, Gregory L. Rorrer, David G. Foster

6th Edition

1118947460, 978-1118947463

More Books

Students also viewed these Chemical Engineering questions