1. Photolithography, photoresist chemistry and structure (10 points): a. Define, compare and contrast the following photolithography terms: Subtractive and additive processes (2 points) Positive and negative photoresists (2 points) b. What are the three components of photoresists, and what are their functions? (3 points) a. Which structure-property relationships of polymers are exploited to create photoresists? (3 points)