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2 5. In the presence of outgassing, the time-dependent change of chamber pressure during vacuum pump operation was studied. The pumping speed of the pump
2 5. In the presence of outgassing, the time-dependent change of chamber pressure during vacuum pump operation was studied. The pumping speed of the pump is 30 L/sec, and the chamber volume is 30L. The chamber was evacuated to 10-5 Torr. After turning off the pump, it was confirmed that the pressure rose to 103 Torr in 1000 seconds, confirming that the outgassing was serious. How much is outgassing? If pumping for a long enough time, what is the expected final pressure? draw final figures by writing in a form that describes the solution process in detail
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