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4 2 1 3 11 5 7 6 Figure: VTS system overview 7 8 Hint: LO-roughing valve, Hi-Roughing valve, Mass flow controller, Hot cathode

4 2 1 3 11 5 7 6 Figure: VTS system overview 7 8 Hint: LO-roughing valve, Hi-Roughing valve, Mass flow controller, Hot cathode lon gauge, Rotary vane pump, Throttle valve, Convection Pirani gauge (Foreline Roughing gauge), Baraton Capacitance gauge, PPT Quadrupole RGA, turbo drag pump. 10 9 Capacitanie Gauge - Pirani Gauge - Vent-In Valve - RGA (Residual Gas Analyzer. High Vacuum Pump Mechanical Pump - Hot Cathode Gareye -Roughing Valve - Throttle Valve Energy Meter - Glass Chamber

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