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7. A) Continuing from a pre-deposition of dopants to a substrate with a bulk concentration of 1016/cm3, a drive-in step at 1 100 C yields
7. A) Continuing from a pre-deposition of dopants to a substrate with a bulk concentration of 1016/cm3, a drive-in step at 1 100 C yields a final junction depth of 1.1415 um and a surface concentration of 3 x 1017/cm3. Given that the Arrhenius activation energy is 3.56 ev and the Do is 0.32 cm2/s, determine the drive-in time (in hour). (6 points) B) Determine the total number of dopants per unit area introduced in this dual- diffusion process. (4 points) Your
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