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923. A boron predep and drive are performed with the following parameters: Ne 3 x 10 5 cm-3 T = 950C No1 = Nsl

923. A boron predep and drive are performed with the following parameters: Ne 3 x 10 5 cm-3 T = 950C No1 = Nsl Xj2 = 2m No2 = 1 x 1019 cm-3 Assume SOA and use S&M. a. Calculate A, A1, and A2. b. Calculate t in minutes. C. Calculate t for T = 1050, 1100, and 1150C. Which combination would you use? Why?

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