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A process pump has a pumping speed (S) of 1000 L/min, independent of the inlet pressure. This pump is connected to a process chamber through
A process pump has a pumping speed (S) of 1000 L/min, independent of the inlet pressure. This pump is connected to a process chamber through 10 m of tubing that is 2 cm in diameter. If the desired chamber pressure is 2 torr, calculate the maximum gas throughput that can be introduced into the chamber in standard liters per minute
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