Answered step by step
Verified Expert Solution
Question
1 Approved Answer
A researcher is trying to maximize a Chemical Deposition Rate. A full factorial experiment is run on 2 factors, Chemical Flow Rate and RD Power.
A researcher is trying to maximize a Chemical Deposition Rate. A full factorial experiment is run on 2 factors, Chemical Flow Rate and RD Power. Flow Rate (X1) is run at 17 and 21 SCCM. RF Power (X2) is run at 160 and 200 W. There are also center points run at Flow Rate=19 SCCM and RF Power = 180 W. The results show that there are no quadratic (curvature) effects and no interaction. The main effects are both significant. The regression equation is: Y= 15.4 + 0.85 X1 + 0.50 X2 The next step is to run a Slope of Steepest Ascent. The first run of the Flow Rate will be at 21 SCCM. What will be the corresponding first run for the RF Power
Step by Step Solution
There are 3 Steps involved in it
Step: 1
Get Instant Access to Expert-Tailored Solutions
See step-by-step solutions with expert insights and AI powered tools for academic success
Step: 2
Step: 3
Ace Your Homework with AI
Get the answers you need in no time with our AI-driven, step-by-step assistance
Get Started