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After evacuation of a chamber whose volume is 30 L to a pressure of 1 x 10-6 torr, the pumps are isolated. The pressure
After evacuation of a chamber whose volume is 30 L to a pressure of 1 x 10-6 torr, the pumps are isolated. The pressure rises to 1 x 10-5 torr in 3 min. a. What is the leakage rate? b. If a diffusion pump with an effective speed of 40 L/sec is attached to the chamber, what ultimate pressure can be expected?
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Given data The volume of the chamber V 30 L Initial pressure P 1 11...
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Fundamentals of Thermodynamics
Authors: Richard E. Sonntag, Claus Borgnakke, Gordon J. Van Wylen
6th edition
471152323, 978-0471152323
