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ALD company is planning on using the following mechanism to fabricate WS 2 film with WF 6 , H 2 , and H 2 S
ALD company is planning on using the following mechanism to fabricate WS film with WF and
:
Step : WFg
Step : WSs
When buying the raw gases, what ratio should they get under the same temp. and pressure
Can and will react? Based on this consideration, can they switch to CVD for this process?
An alternative sputtering way is to use: plasma
Assume we know: WF is USDmol H is USDmol HS is USDmol and W is USDmol
Shall they change to sputtering?
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