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ALD company is planning on using the following mechanism to fabricate WS 2 film with WF 6 , H 2 , and H 2 S

ALD company is planning on using the following mechanism to fabricate WS2 film with WF6,H2, and
H2S :
Step 1: WF6(g)+3H2(g)W(s)+6HF(g)
Step 2: W(s)+2H2S(g) WS2(s)+2H2(g)
When buying the raw gases, what ratio should they get (under the same temp. and pressure)?
Can H2 and H2S will react? Based on this consideration, can they switch to CVD for this process?
An alternative sputtering way is to use: , plasma)+W(s)WS2(s)+H2(g).
Assume we know: WF6 is 50 USD/mol, H2 is 20 USD/mol, H2S is 150 USD/mol, and W is 110 USD/mol.
Shall they change to sputtering?
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