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Aluminum atoms are to be diffused into a silicon wafer using both predeposition and drive - in heat treatments; the background concentration of A l
Aluminum atoms are to be diffused into a silicon wafer using both predeposition and drivein heat treatments; the background concentration of in this silicon material is known to be atoms The drivein diffusion treatment is to be carried out at for a period of which gives a junction depth of Compute the predeposition diffusion time at if the surface concentration is maintained at a constant level of atoms For the diffusion of in values of and are and respectively.
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