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As part of the scaling process, the thickness of the gate oxide tox has been thinned down following each introduction of a new technology node.

As part of the scaling process, the thickness of the gate oxide tox has been thinned down following each introduction of a new technology node. This has the benefit of increasing the COX capacitance. Nevertheless, what might be some concern if the voltage we apply at the gate remains relatively the same, but the thickness of the insulator is becoming very small?

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