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Calculate and compare the activation energies of growing polysilicon (plot A shown below) and epitaxial silicon (plot B) from silane (SiH4). Which activation is larger

Calculate and compare the activation energies of growing polysilicon (plot A shown below) and epitaxial silicon (plot B) from silane (SiH4). Which activation is larger and explain why.

Plot A.

image text in transcribedPlot B.

image text in transcribed

Maximum growth rate for formation of single cryetalline suicon as a function of temperature

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