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- Consider that we have a silicon wafer with a thin aluminum film, and you want to have an oxide (Al2O3 or SiO2) layer on

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- Consider that we have a silicon wafer with a thin aluminum film, and you want to have an oxide (Al2O3 or SiO2) layer on top, what different methods would you use (at least two)? Assume you have full access to the cleanroom of Micronova. - Describe the chemical reactions for any method you choose

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