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Consider the chemical vapor deposition ( CVD ) process for the manufacture of solid silicon thin films as illustrated below. A dilute mixture of 0
Consider the chemical vapor deposition CVD process for the manufacture of solid silicon thin films as illustrated below. A dilute mixture of mol silane, species A in gas species B enters the chamber and flows over a square wafer of per side at a bulk velocity of At the surface of the Si wafer, the following reaction takes place:
Consider the chemical vapor deposition CVD process for the manufacture of solid silicon thin films as illustrated below. A dilute mixture of mol silane, species A in gas species B enters the chamber and flows over a square wafer of per side at a bulk velocity of At the surface of the Si wafer, the following reaction takes place:
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