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Consider the chemical vapor deposition ( CVD ) process for the manufacture of solid silicon thin films as illustrated below. A dilute mixture of 0

Consider the chemical vapor deposition (CVD) process for the manufacture of solid silicon thin films as illustrated below. A dilute mixture of 0.1mol% silane, SiH4(species A), in H2 gas (species B) enters the chamber and flows over a square Si wafer of 15cm per side at a bulk velocity of 50cms. At the surface of the Si wafer, the following reaction takes place:
SiH4(g)Si(s)+2H2(g)
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