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Design three masks for diffusion, window, and metal layers to realize a 5 kohms resistor with n-type diffusion with sheet resistance of 250 ohms per
Design three masks for diffusion, window, and metal layers to realize a 5 kohms resistor with n-type diffusion with sheet resistance of 250 ohms per square and lead metal lines. The minimum feature size allowed is 10nm for line width and window opening. Also, 50 nm extension of metal feature and diffusion feature over the window opening is required
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