EX$20$ RO $$: $2\mathrm{.}05$x$10-6$ m$3/$m$2$ s kPa $2\mathrm{.}03$x$10-5$ m$3/$m$2$ s $34,000$ ppm $$: $2\mathrm{.}5$ kg$/$s $$: $1$: $6000$ kPa $$: $5800$ kPa $$: $101$ kPa