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Figure 28.26 Processing step Cross section 1. 2. 3. 4. 5. Description Sample of n-type silicon Silicon n Grow silicon dioxide by oxidation Oxide
Figure 28.26 Processing step Cross section 1. 2. 3. 4. 5. Description Sample of n-type silicon Silicon n Grow silicon dioxide by oxidation Oxide n UV light n 6. Apply photoresist Photo- resist Mask Expose photoresist, using appropriate lithographic mask Develop photoresist Etch silicon dioxide
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