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kinetics 2). Calculate the reaction rate for the gas-solid reaction: SiH4(g)+ekp,eSiH3+21H2+eSiH3+XSiH3XSiH3XKDSiX+23H2(g) Use: Kad for reversible reaction 2 ) and kD for slow reaction 3 )

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2). Calculate the reaction rate for the gas-solid reaction: SiH4(g)+ekp,eSiH3+21H2+eSiH3+XSiH3XSiH3XKDSiX+23H2(g) Use: Kad for reversible reaction 2 ) and kD for slow reaction 3 )

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