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One integrated circuit design calls for the diffusion of arsenic into silicon wafers; the background concentration of As in Si is 2 . 5 1

One integrated circuit design calls for the diffusion of arsenic into silicon wafers; the background concentration of As in Si is 2.51020 atoms ?m3. The predeposition heat treatment is to be conducted at 1000C for 45 minutes, with a constant surface concentration of 81026 As atoms ?m3. At a drive-in temperature of 1100C, determine the diffusion time required for a junction depth of 1.2m. For this system, values of Qd and D0 are 4.10eV and 2.2910-3m2s, respectively. hours
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