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One integrated circuit design calls for the diffusion of arsenic into silicon wafers; the background concentration of As in Si is 2 . 5 1
One integrated circuit design calls for the diffusion of arsenic into silicon wafers; the background concentration of As in Si is atoms The predeposition heat treatment is to be conducted at for minutes, with a constant surface concentration of As atoms At a drivein temperature of determine the diffusion time required for a junction depth of For this system, values of and are and respectively. hours
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