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One integrated circuit design calls for the diffusion of arsenic into silicon wafers; the background concentration of As in S i is 2 . 5
One integrated circuit design calls for the diffusion of arsenic into silicon wafers; the background concentration of As in is
atoms The predeposition heat treatment is to be conducted at for minutes, with a constant
surface concentration of atoms At a drivein temperature of determine the diffusion time required
for a junction depth of For this system, values of and are and respectively.
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