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please answer a) List four (4) main components of the ion implantation hardware. (4 marks) b) lon implantation has completely replaced diffusion as a method

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a) List four (4) main components of the ion implantation hardware. (4 marks) b) lon implantation has completely replaced diffusion as a method of choice in semiconductor process technology. Explain three (3) advantages of ion implantation over the diffusion process. (6 marks)

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