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Please ClearlAnswer All Parts Question 19: Motorola Inc. is drastically reducing its emissions of perfluorocompounds (PFCs), solvents used in chip manufacturing as a stripper to
Please ClearlAnswer All Parts
Question 19: Motorola Inc. is drastically reducing its emissions of perfluorocompounds (PFCs), solvents used in chip manufacturing as a stripper to clean polymer residues. The company has developed an alternative, "dry" process that dissolves the polymer residue with an ionized gas plasma of oxygen, hydrogen, nitrogen, and small amounts of nitrogen trifluoride (NF3), followed by a final deionized-water rinse. 39 (a) Why would Motorola be interested in reducing PFC emissions? (b) Are there any issues that you foresee with use of this new process? (c) How can you devise an even better process for cleaning chips
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