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Problem 2 ( 35 points): In wafer manufacturing, the factors thought to influence induced surface charge are cleaning method and the position on the wafer
Problem 2 ( 35 points): In wafer manufacturing, the factors thought to influence induced surface charge are cleaning method and the position on the wafer where the charge was measured. The surface charge (x1011q/cm2) response data are as the following table, Please create a design matrix and calculate the main and interaction effects
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