Answered step by step
Verified Expert Solution
Link Copied!
Question
1 Approved Answer

Problem 5 A heater for a semiconductor wafer has first-order dynamics, that is, the transfer function relating changes in temperature TC to changes in the

image text in transcribed
Problem 5 A heater for a semiconductor wafer has first-order dynamics, that is, the transfer function relating changes in temperature TC to changes in the heater input power level PkW is P(s)T(s)=s+1K where K is the gain and is the time constant of the heater system in minutes. The process was at steady state when an engineer changed the power input stepwise from 1kW to 3kW. The engineer noticed the following: (i) The process temperature was initially at 50C. (ii) Five minutes after changing the power input, the temperature is 55C. (iii)Twelve minutes later the temperature is 58C. Determine the values of the gain (K) and time constant () in the heater transfer function

Step by Step Solution

There are 3 Steps involved in it

Step: 1

blur-text-image
Get Instant Access to Expert-Tailored Solutions

See step-by-step solutions with expert insights and AI powered tools for academic success

Step: 2

blur-text-image_2

Step: 3

blur-text-image_3

Ace Your Homework with AI

Get the answers you need in no time with our AI-driven, step-by-step assistance

Get Started

Recommended Textbook for

Thermodynamics Fundamentals And Engineering Applications

Authors: William C. Reynolds, Piero Colonna

1st Edition

0521862736, 9780521862738

More Books

Students explore these related Chemical Engineering questions