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Q . A reactor is used to remove SiO 2 from a wafer in semiconductor manufacturing by contacting the SiO 2 surface with HF .

Q. A reactor is used to remove SiO2 from a wafer in semiconductor manufacturing by
contacting the SiO2 surface with HF. The reactions are:
6HF(g)+ SiO2(s)-> H2SiF6(l)+2H2O(l)
H2SiF6(l)-> SiF4(g)+2HF(g)
Assume the reactor is loaded with wafers having a silicon oxide surface, a flow of 50% HF and
50% nitrogen is started, and all the H2SiF6 reacts. In the reaction 10% of the HF is consumed.
What is the composition of the exhaust stream?

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