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Q . A reactor is used to remove SiO 2 from a wafer in semiconductor manufacturing by contacting the SiO 2 surface with HF .
Q A reactor is used to remove SiO from a wafer in semiconductor manufacturing by
contacting the SiO surface with HF The reactions are:
HFg SiOs HSiFlHOl
HSiFl SiFgHFg
Assume the reactor is loaded with wafers having a silicon oxide surface, a flow of HF and
nitrogen is started, and all the HSiF reacts. In the reaction of the HF is consumed.
What is the composition of the exhaust stream?
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