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Q#6: A heater for a semiconductor wafer has first-order dynamics, that is, the transfer function relating changes in temperature T to changes in the heater
Q\#6: A heater for a semiconductor wafer has first-order dynamics, that is, the transfer function relating changes in temperature T to changes in the heater input power level P is P(s)T(s)=1+sK where K has units [C/Kw] and T has units [min]. The process is at steady state when an engineer changes the power input stepwise from 1 to 1.5Kw. She notes the following: (i) The process temperature initially is 80C. (ii) Four minutes after changing the power input, the temperature is 230C. (iii) Thirty minutes later the temperature is 280C. (a) What are K and T in the process transfer function? (b) If at another time the engineer changes the power input linearly at a rate of 0.5 kW/min, what can you say about the maximum rate of change of process temperature: When will it occur? How large will it be
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