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See plotted Hk1-T1,Hk1-T2,Hk2-T1,Hk2-T2 You received experimental data ( 2 Excel files) with very little detail, except the following: - Each Excel file is from a

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See plotted Hk1-T1,Hk1-T2,Hk2-T1,Hk2-T2

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You received experimental data ( 2 Excel files) with very little detail, except the following: - Each Excel file is from a different hafnium-based high-k dielectric: High-k \#1 and High-k \#2 (see Fig. below). - Within each Excel file, there are: - Two thickness values [individual worksheets (e.g., HK1_T1, HK1_T2)] - For each thickness, there are C-V data for three areas: 2E5cm2;5E5cm2;1E4cm2 1. Plot and summarize the "raw" 5E5cm2CV data for each thickness, then determine the following: a. What CV data is provided by the meter for the given area? b. Within each hafnium type (i.e., within HK1 ), which one has a thinner dielectric? How can you tell (the data provides you with TWO answers)? c. Comparing both Excel files, which one has the higher dielectric constant? Explain your reasoning for your selection. i. CV_HK_1_AreaDep_LabWorkData.xlsx High-k \#1: HKl ii. CV_HK_1_AreaDep_LabWorkData.xlsx High-k \#2: HK2 2. For the data provided for a given hafnium-based dielectric and given thickness (i.e, one worksheet of a given Excel file), how can one test the accuracy of the area definition obtained from the mask documentation noted above? Pick one worksheet... Hk1-T1 HK1-T2 Hk2-T1 HK2-T2 You received experimental data ( 2 Excel files) with very little detail, except the following: - Each Excel file is from a different hafnium-based high-k dielectric: High-k \#1 and High-k \#2 (see Fig. below). - Within each Excel file, there are: - Two thickness values [individual worksheets (e.g., HK1_T1, HK1_T2)] - For each thickness, there are C-V data for three areas: 2E5cm2;5E5cm2;1E4cm2 1. Plot and summarize the "raw" 5E5cm2CV data for each thickness, then determine the following: a. What CV data is provided by the meter for the given area? b. Within each hafnium type (i.e., within HK1 ), which one has a thinner dielectric? How can you tell (the data provides you with TWO answers)? c. Comparing both Excel files, which one has the higher dielectric constant? Explain your reasoning for your selection. i. CV_HK_1_AreaDep_LabWorkData.xlsx High-k \#1: HKl ii. CV_HK_1_AreaDep_LabWorkData.xlsx High-k \#2: HK2 2. For the data provided for a given hafnium-based dielectric and given thickness (i.e, one worksheet of a given Excel file), how can one test the accuracy of the area definition obtained from the mask documentation noted above? Pick one worksheet... Hk1-T1 HK1-T2 Hk2-T1 HK2-T2

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