Question
Sketch the plot that a stylus-profilometer would produce if the stylus is scanned along the etched oxide layer (fabricated using the scheme below with
Sketch the plot that a stylus-profilometer would produce if the stylus is scanned along the etched oxide layer (fabricated using the scheme below with a positive photoresist). Note that the transparent glass and opaque chrome structure below the photoresist- coated silicon wafer represents the photolithography mask. Si Glass Chrome PR Oxide
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Design And Analysis Of Experiments
Authors: Douglas C., Montgomery
5th Edition
978-0471316497, 0471316490
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