Answered step by step
Verified Expert Solution
Question
1 Approved Answer
This problem deals with a capacitive accelerometer structure shown below. The accelerometer consists of a cube of silicon ( side dimension, a , of 1
This problem deals with a capacitive accelerometer structure shown below. The accelerometer consists of a cube of silicon side dimension, a of mm that is supported using two beams as shown. Assume the following dimensions for the accelerometer:
The side of the proof mass cube, a: mm Length of each beam, L m
Width of each beam, w m Thickness of each beam, t m
Gap between proof mass and electrode, g m
Density of Si Kgm
Young's Modulus of Si : GPa all directions
Calculate the sensitivity of this accelerometer to acceleration in z direction, Delta CDelta a
Step by Step Solution
There are 3 Steps involved in it
Step: 1
Get Instant Access to Expert-Tailored Solutions
See step-by-step solutions with expert insights and AI powered tools for academic success
Step: 2
Step: 3
Ace Your Homework with AI
Get the answers you need in no time with our AI-driven, step-by-step assistance
Get Started