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You are given an p-type Si wafer/substrate. The task is to fabricate a simple MOS type capacitor as shown in figure. Starting from the bare
You are given an p-type Si wafer/substrate. The task is to fabricate a simple MOS type capacitor as shown in figure. Starting from the bare wafer, sketch the cross sectional view of each of the process steps in the process flow until the complete capacitor fabrication is accomplished. Label the diagrams clearly with the materials used including the masks, and briefly describe the process for each step. Note, the dimensions and the profiles of coverage can be approximate. You are given an p-type Si wafer/substrate. The task is to fabricate a simple MOS type capacitor as shown in figure. Starting from the bare wafer, sketch the cross sectional view of each of the process steps in the process flow until the complete capacitor fabrication is accomplished. Label the diagrams clearly with the materials used including the masks, and briefly describe the process for each step. Note, the dimensions and the profiles of coverage can be approximate
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