Your question: Course: MEEG 207 mechanical control mechanical control OV m X Substrate 00 = Av 2(10-2) The electrostatic attraction force drives the membrane: f(v,x) where is the permittivity of air = 1.0006, A is the area of the membrane = 400um*500um, and V is the applied voltage. m, k, and bare the effective mass, stiffness, and damping of the membrane, respectively; 10 is the initial gap; and a is the displacement. (a) The displacement x is measured from the membrane's equilibrium position in Fig. Determine the relationship between the steady states of applied voltage v (Average Velocity) and average displacement I. - 2k Plot the figure of -- in the range of 0 x 2 100 m using MATLAB if 24 = x 0 1 x v = ; 20 = 2 x 10 m, mg = 1.5 x 10-6N; g = 9.8m/s; b = 0.01Ns/m; 1018-2 12:20 k = 1N/m (b) Linearize the system around an equilibrium point (average displacement I, Average X(s) V(s) Velocity v). Find the transfer function G(s) = (8) that is valid about the equilibrium. Show that G(s) becomes unstable for (average displacement a) > (c) From Part I (a) and (b), use MATLAB to plot a unit step response around an equilibrium point (average displacement a) = 10-6 m.