The photoresist thickness in semiconductor manufac turing has a mean of 10 micrometers and a standard deviation

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The photoresist thickness in semiconductor manufac turing has a mean of 10 micrometers and a standard deviation of I micrometer. Assume that the thickness is normally distributed and that the thicknesses of different wafers are independent.

(a) Determine the probability that the average thickness of 10 wafers is either greater than 11 or less than 9 micrometers.

(b) Determine the number of wafers that need to be measured such that the probability that the average thickness ex- ceeds 11 micrometers is 0.01.

(c) If the mean thickness is 10 micrometers, what should the standard deviation of thickness equal so that the probability that the average of 10 wafers is either greater than 11 or less than 9 micrometers is 0.001?

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Applied Statistics And Probability For Engineers

ISBN: 9780470053041

5th Edition

Authors: Douglas C. Montgomery, George C. Runger

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