Answered step by step
Verified Expert Solution
Link Copied!

Question

1 Approved Answer

1. A heater for a semiconductor wafer has first-order dynamics, that is, the transfer function relating changes in temperature T to changes in the heater

image text in transcribed

1. A heater for a semiconductor wafer has first-order dynamics, that is, the transfer function relating changes in temperature T to changes in the heater input power level P is P(s)T(s)=s+1K where K has units [C/Kw ] and has units [min]. The process is at steady state when an engineer changes the power input stepwise from 1 to 2kW. She notes the following: (i) The process temperature initilly is 100C. (ii) Four minutes after changing the power input, the temperature is 400C. (iii) Thirty minutes later the temperature is 500C. (a) What are K and t in the process transfer function? (b) If at another time the engineer changes the power input linearly at a rate of 0.5kW/min, what can you say about the maximum rate of change of process temperature: When will it occur? How large will it be

Step by Step Solution

There are 3 Steps involved in it

Step: 1

blur-text-image

Get Instant Access to Expert-Tailored Solutions

See step-by-step solutions with expert insights and AI powered tools for academic success

Step: 2

blur-text-image

Step: 3

blur-text-image

Ace Your Homework with AI

Get the answers you need in no time with our AI-driven, step-by-step assistance

Get Started

Recommended Textbook for

Inverse Heat Conduction Ill Posed Problems

Authors: Hamidreza Najafi, Keith A. Woodbury, Filippo De Monte, James V. Beck

2nd Edition

1119840198, 978-1119840190

More Books

Students also viewed these Chemical Engineering questions

Question

using signal flow graph

Answered: 1 week ago