Question: 1. For the integrated circuit interconnect shown below: The copper thickness is 5000 A and conductivity is 5 x 107 mho/m, the tungsten thickness

1. For the integrated circuit interconnect shown below: The copper thickness is

5000 A and conductivity is 5 x 107 mho/m, the tungsten thickness

1. For the integrated circuit interconnect shown below: The copper thickness is 5000 A and conductivity is 5 x 107 mho/m, the tungsten thickness is 500 A and conductivity is 2 x 107 mho/m, W=0.25 um Cu +1=200 A 12-5000 A Erl=6 Er2 = 4 W 1) 2 If the top conductor has a positive potential: g) What are the normal flux density vectors in both dielectric layers 1 and 2? h) What are the normal electric field vectors in 1 and 2? 1) What are the normal polarization vectors in 1 and 2? What are the electric susceptibilities in 1 and 2? 1)

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