1. Where are the thermal actuators located in this MEMS? How do they work ? 2. Explain why each leg can be represented by a RPU mechanism, when_1=1,= 1/2/2 3. Draw the 4-RPU mechanism equivalent to the micro-mirror. 4. What are the degrees of freedom of the 4-RPU mechanism ? By analysing the mobilities of the mirror, explain why it may be called a "pan-tilt-piston" mechanism. . Derive the implicit kinematic model associated to the equivalent 4-RPU mechanism. Extract the inverse kinematic model from the implicit kinematic model. Assuming that there is no rotational velocity around the axis perpendicular to the mirror plate and that there is no lateral velocities for the mirror center, give the expression of the inverse kinemac Jacobian matrix. - (Bonus: ) Can you explain why the mechanism is over-actuated and what are the associated risk and potential solution to this risk?