1. Which among the following microfabrication principles is most useful for integrating mechanical and electrical micro-components on the same BioMEMS layout? a. Bulk Micromachining b. Surface Micromachining c. Both a and b d. None of the above Reason: 2. Which among the following terms can be associated with the standard photolithography process in BioMEMS fabrication? a. UV Aligner b. Dark field c. Negative resist d. All of the above Reason: 3. What is the minimum number of sacrificial oxide layers required to fabricate the structure shown here