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2. ( )What is the possible resolution for the following setup in an DUV(193nm) immersion photolithography and a double patterning ? If K1 =0.24, NA=1.05,

2. ( )What is the possible resolution for the following setup in an DUV(193nm) immersion photolithography and a double patterning ? If K1 =0.24, NA=1.05, n=1.56 (a) 45nm; (b) 28nm; (c) 14nm; (d) 7nm

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