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3 For a 100keVSn ion in Si, calculate the energy going into displacement processes, v, from Eq. (7.18) (set E0=T ) and compare your answer

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3 For a 100keVSn ion in Si, calculate the energy going into displacement processes, v, from Eq. (7.18) (set E0=T ) and compare your answer with those given in Table 7.2 and Fig. 7.10. Table 7.2. Total amount of energy available for nuclear collisions, vp(E0) Taken from J. W. Mayer et al., Ion Implantation in Semiconductors (Academic Press, New York, 1970). Data supplied by P. V. Thomsen (Aarhus University). Fig. 7.10. Energy lost in atomic collisions, v(E), versus particle energy, . The dashed line represents the limit where all energy is lost in non-ionizing events. The solid line is the calculation from Haines and Whitehead (1966)

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