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4.) A 2575wt%AlCu alloy source is to be sputtered on a silicon wafer. What composition (wt%) will the source have at steady-state? Assume we are
4.) A 2575wt%AlCu alloy source is to be sputtered on a silicon wafer. What composition (wt\%) will the source have at steady-state? Assume we are using 1keVAr, with sputter yields of SAl= 1.527 and SCu=2.821 Step by Step Solution
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Principles and Modern Applications of Mass Transfer Operations
Authors: Jaime Benitez
2nd edition
470181788, 470181782, 978-1-119-0427, 978-0470181782
