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7 0 . In a laboratory experiment involving a chemical vapor deposition ( CVD ) process, how would you determine the effect of precursor concentration
In a laboratory experiment involving a chemical vapor deposition CVD process, how would you determine the effect of precursor concentration and deposition temperature on the thin film growth rate and properties? Detail the selection of precursors, the experimental setup, the procedure for varying operating conditions, and the methods for measuring thin film characteristics such as thickness, uniformity, and crystallinity.
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