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A comb-drive actuator (CDA) is given below. Each finger is triangular. Finger width: w Finger spacing: g Number of fingers on one comb: N
A comb-drive actuator (CDA) is given below. Each finger is triangular. Finger width: w Finger spacing: g Number of fingers on one comb: N a) Drive expression for the electrostatic energy stored in this CDA. b) Drive expression for the electrostatic force in this CDA. d) Derive displacement versus voltage for this CDA.
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Signals and Systems using MATLAB
Authors: Luis Chaparro
2nd edition
123948126, 978-0123948120
