A loan pool has 80 loans with $1 Million par value and a fixed coupon rate of 7%. The par value for the senior and equity tranches is 75% and 15%, respectively. Remaining portion is for junior tranche. There were six defaults with recovery rate of 20% at the end of the period. 70 loans survived during the year. The value of trust account at the beginning is $5 Million, earning 4% per annum.

Based on this information, determine the terminal cash flows to senior, junior and equity tranches.