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A Si single crystal with a length of 1 . 5 m is grown by the Czochralski technique for the production of wafers with a
A Si single crystal with a length of m is grown by the Czochralski technique for the production of wafers with a desired boron dopant level of ppm Thus, ppm B is added to the Si melt. Calculate the boron concentration profile in the single crystal assuming that boron is incorporated into the single crystal according to the equilibrium partition coefficient of What portion of the single crystal would meet the specification that the dopant level is within pm of the target level.
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