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A silicon wafer with thickness of 9 2 5 m is being heated with a uniform heat flux at the lower surface. The silicon wafer
A silicon wafer with thickness of is being heated with a uniform heat flux at the lower surface. The silicon wafer has a thermal conductivity that varies with temperature and can be expressed as where and To avoid warping, the temperature difference across the wafer thickness can not exceed If the upper surface of the silicon wafer is at a uniform temperature of determine the maximum allowable heat flux.
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