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Accelerometer 'noise floor' (or the smallest detectable signal): Consider a MEMS accelerometer with an effective mass of M = 0.1 mg (milli-gram), the suspension beams
Accelerometer 'noise floor' (or the smallest detectable signal): Consider a MEMS accelerometer with an effective mass of M = 0.1 mg (milli-gram), the suspension beams having an effective spring constant of K= 1 N/m, and an effective damping factor of D = 5x10-3 Ns/m. (1) Calculate the noise floor of the micro-accelerometer due to the Brownian motion of the micro- accelerometer at room temperature. Provide your answer in the units of [m/s2 /Hz] as well as in ['g'/Hz] (g=1 gravity=9.8m/s2 ). (2) What is the quality factor of the micro-accelerometer? Would you increase or decrease damping to improve the performance of the accelerometer? Why
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